Fabrication Of Electrostatic Force Actuating Fabry-Perot Filter

Fabry-Perot tunable filter is an important device of modern optical communication and sensor systems. F-P filter Employing MEMS(Micro-Electro-Mechanical systems) technology is a challenging solution because of MEMS properties of small volume, high performance. This thesis gives a new way to fabricate F-P tunable filter and explore the relative technologies.Conventional micro fabrication technology was introduced first, and then some kinds of cavity length tunable F-P filter was introduced, next was it's usages in sensor systems. In the next chapter this thesis gave the basic interference theory, and analyse some important parameters. Then was the design of the tunable board, the material of the mirror, and the connection between the reflectivity and the mirror thickness. Next was the analysis of the mechanic properties and optical properties of the design filter.This thesis introduced the whole fabrication processes, and emphatically introduced how to fabricate F-P cavity with wet etch technology, how to bond to silicon and glass wafer together, and how to fabricate the mirrors and electrodes. In the thesis, the fabrication processes is compatible with SOI and ordinary silicon wafer, dielectric mirror and metal mirror.The performance of Fabry-perot filter has been tested with the relative test system compose of optical source, collimators and optical spectral analyzer. With the ordinary silicon wafer with a thickness of 250 micron and the Pyrex 7740 glass wafer and the golden mirror with a thickness of 100nm, we fabricated the filter successfully, which has the Insert Loss about 20dB, and the central wavelength of 1530nm.