The Research Of Fabrication And Testing Technology Of The Monocrystalline Silicon Optical Elements With Super-Smooth Surfaces

The fabrication and testing technology of the super-smooth X-ray optical components of the synchrotron radiation is a new emerging area, it works in the short-waveband and is one of the basic contents of the optics foundation engineering research of the soft X-ray.This article described the optical system characteristic of the synchrotron radiation light beam, the research goal, the significance, the background, the present situation of our country and the by contrast with overseas level of our country in fabrication and testing technology of the super-smooth synchrotron radiation optical components. It briefed the domestic and foreign present situation of the super-smooth optical surface processing technology, and each kind of principle and method of the processing technology, as well as each kind of measuring technology of the synchrotron radiation optical components.This article related several examples on fabrication and testing of super-smooth optical elements made of the monocrystalline silicon emphatically, systematically introduced the fabrication, the testing method and the testing result of the optical components. All testing results achieved the design specification, it demonstrated we approached or achieved the overseas advanced level in this area.