Designed Of A Image Sampling System Using In SEM Based On FPGA

Analyzing the limitation of the old model SEM (Scanning Electron Microscope) in our lab, as a result of an earlier production, it is impossible to obtain a high resolution electron-image in the PC, and this image never can be used in other fields.In this paper, an image sampling system with FPGA (Field Programmable Gate Array) was designed to improve the image sampling part of the old model SEM. The system used FPGA as the logical control core in the whole signal sampling. Only need to change the embedded programs on-line can meet the requirements of various image samplings, ease of debugging and wider application. DSP (Digital Signal Processor) performances the controls chip in the control board, and communicated with PC (Personal Computer) by USB 2.0 (Universal Serial Bus) interface.Furthermore, matched software of the image sampling system is presented. With its friendly interface, users can set sampling parameters, control system operation, save images and process pictures. Also, it can do many individuation settings, as anti-color display, pseudo-color display and so on.Currently, the system has been applied in our lab, with portability, user-friendly interface, convenience and stability. At the end of this paper, some scanning images by this system are given, which have clear-cut lines and vivid samples. A longer running to prove that the system be of stable and reliable performance.