Research On A Method Of Micro-table Movement Posture Measurement And Tracking

With the ever-changing development of modern machine manufacturing technology, micro-machining has been attached gradually. Micro-machining technology is supporting the development of new MEMS technology, involving electronic, mechanical, chemical, biological, and other disciplines, and it is widely used in national defense, aerospace, medical, biomedical, industrial manufacturing, consumption and other areas of civil, it is also considered as one of the most promising and revolutionary high-tech in the twenty-first century. However, in the micro-machining processing, because the micro-mechanical structure and operation of platform carrying capacity are relatively small, the traditional geometric detection sensor does not apply to detect geometry of workpiece in micro-mechanical machining processing, therefore, the geometric size of micro-mechanical testing only use non-contact measurement method.Based on machine binocular vision measurement principle ,this paper presents a new method of micro-table three-dimensional motion attitude measurement and tracking , in this method ,the micro-machining platform is abstracted as a rectangular shape object, and the four corners of the rectangular shape are selected as feature points, the binocular vision measurement principle is used to achieve the world coordinate measurement and characterization of three-dimensional dynamic match and point tracking of the feature points ,and the change of three-dimensional coordinates of feature points is used to descript the posture change of feature points of micro-table , achieving real-time, non-contact measurement of micro-table posture and the rapid tracking and detection, and this method can reduce the complexity of three-dimensional micro-table motion error detection.The main research results are as follows:1. Based on pinhole imaging principles, established the projective transformation model of camera imaging process, the calculation method of three-dimensional coordinates of space point, combined with binocular vision measurement method to obtain three-dimensional posture measurement method of micro-table.2. Using basic methods of digital image processing, the tracking algorithm is designed based on feature point matching and matching algorithm is got based on template search to implement the micro-table posture dynamic tracking.3. To use the camera and the CMM, set up micro-table posture measurement system, the system hardware design and software design are also completed, and the experiment proved the feasibility of the measurement system.