The Design Of LC Resonant High-temperature Acceleromter

Micro / nano electronic mechanical systems (M / NEMS) with a small, low power, high integration can accomplish great advantages which the high mechanical system cannot fulfill. It can also be embedded in larger systems to automation, intelligence and reliability to a new level.High temperature accelerometer measurement technology has been plagued by high-speed missiles, spacecraft test, high temperature sensors used to take into account various factors: the mechanical strength, oxidation corrosion, cable transmission and other issues. Therefore, Development of a suitable high temperature measurements of the acceleration sensor consistent with the current rapid development of nuclear power, weapons, aerospace needs.This paper proposes the high temperature accelerometer measurement techniques and analyze the tasks required of the indicators. Analysis the content, design tasks, respectively, design on the missile test, ground test with the sensor structure. And refined the theory to be solved, the technical key issues. On the task of sorting out the contents of the preliminary study to determine the ideas and the overall research program, and specific content of the theoretical studies and simulation analysis, the structure simulation results shows the feasibility of the final structure. The further implementation of the program will help the domestic high-temperature sensors of technological innovation, ultra-high temperature environment help to improve the stability of vibration measurement, portability. The task of the project is divided into three specific tasks: non-contact operating principle of passive acceleration sensor, temperature sensor chip design research process, high temperature heat sensor package design. These three tasks have in common the requirement that the sensor's high temperature measurement technology, but they are independent of each part, respectively, from the principle, process, package, described the three aspects of high temperature measurement sensors. Demonstrated by experiment to demonstrate this method.Innovation of this paper is that we design a new operating principle of the sensor, it is the mutual inductance using LC resonance principle to achieve the wireless transmission of acceleration signal, and temperature sensor designed protective structure that take into account the existence of the various effects of high temperature factors, with the versatility and reliability. The ordinary high-temperature thermal protection sensor has a good portability. Meanwhile, the principle for the special design of the sensor detection circuit, the signal detection, frequency sweep, frequency, mathematical calculations, and ultimately the acceleration signal output.