Research On Micro-accelerometer Based On Variable Diffracting Grating

A new type of accelerometer based on variable diffraction grating is introduced in this paper. As the development of aviation and aerospace industries, the requirements of the accelerometer mainly focused on high resolution, small size, high reliability and so on. The proposed micro accelerometer with variable diffraction grating as the sensing element, is analyzed to have a high sensitivity in both displacement and acceleration proceeding from the principle. Also introduce the design of the acceleration sensor mass structre. The mass bulk structure has a large dynamic range which is proved by the simulation of ANSYS. And further structural optimization, so that it has high sensitivity can be achieved under conditions of high dynamic range. The main technology to get the mass is wet processing process, which is much more mature, and the equipment is less demanding. The package of light source and photodetectors, and a detailed description of the packaging process is discussed regarding to the integration of the system. Here use the VCSEL (Vertical Cavity Surface Emitting Laser) as the light source. The packaging process is mainly reference to LED's. At last we do the experiments of displacement and 1g static acceleration test, the result shows that the micro acceleration sensor based on variable diffraction grating has a resolution of 10-5-10-6g, which means it has good practicability and potential.