Study On Control System And Technological Principle For Coater And Developer Equipment

With the rapid development of the IC industry, the domestic traditional second-line chip manufactures and some military institutes also made a great development at the new technology and the production capacity, which have been brought a great demand of the equipment. However, the available choices of the track equipment are limited. On the one hand, foreign equipments such as the SUSS are expensive and after-sales services are difficult to meet the customer demand; on the other hand, technology and reliability of the imported second-hand equipment have problems; the electronic control system is old, and the control software operation is not flexible.Through the research of the international and domestic current coater and developer technology processes, this paper describes a design of equipment control system for the auto metical coater and developer equipment, which is used for the second-line market technology. In this system, the distributed control system idea is adopted, the 32-bit ARM7 chip is used as the core management of the control system, and the 8-bit 51 chips are used as the control chips of each module; the powerful CAN bus can achieve the data exchange and control of each decentralized unit; the system is adopted the convenient interactive graphics mode, which can conveniently observe the running status and manage the running parameters of the equipment through the touch screen. The equipment is achieved to manage 50 kinds of technological recipes and conserve 5000 wafers processing information, and provide real-time consultation operation. Through debugging the system, it proved that the system operation is stable and can meet the requirements of technical index and equipment's functions.Complex and diversiform semiconductor technology make requests for constantly following up the development of the technological skills and improving technological levels. This paper just aims at the control system of the coater and developer technology used for the domestic second-line markets. What's more, the further research of the technological skills such as more scientific technology and clean technology of compatible single-chip will be studied in the future...