The Study For The Key Techniques Of Silicon Optical Waveguide And Its Device Structure

With the increasing demand for information transmission of people, the optical communication technology is widely used. Since the fiber was invented in the decades, the optical communication technology is well advanced. The optical communication devices are cornerstone of optical communication technology, and they are studied, developed, improved and applied constantly. With using these optical communication devices, the optical communication can be more faster, longer and cheaper. Then people can enjoy convenient and high-speed communication services with them.In this paper, we studied the one kind of the different optical communication devices, silicon optical waveguide and the devices based on silicon optical waveguide. We studied the silicon slot waveguides' dispersion characteristics, and got the effect of waveguides' dispersion with different cross-section parameters. And then, we found that by selecting suitable slot's structural parameters, silicon slot waveguide could be used to compensate the residual dispersion of optical communication link. Then we studied the directional coupler based on silicon slot waveguide, and researched the dispersion compensation with different cross-section parameters and waveguides' gap. We proposed that the directional coupler can do dispersion compensation and WDM simultaneously. Finally this paper studied one kind of MOS capacitor electrode silicon Mach-Zehnder electro-optic modulator. We researched its modulation characteristic with different cross-section parameters and doping concentration. This could be used in applications.