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The Research Of Ion Exchange Technology Fabricating Waveguides On Glasses Substrates

Posted on:2006-12-21Degree:MasterType:Thesis
Country:ChinaCandidate:X ChenFull Text:PDF
GTID:2168360152971021Subject:Microelectronics and Solid State Electronics
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In the paper, it is mainly focused on researches and experiments of the Ion-Exchange technology, which is used in fabricating the optical waveguides in glasses. Firstly, it introduced the fundamental theories of Ion Exchange thoroughly, including the mechanism of Ion Exchange, the principle resulting in the refractive index change, and the effect of equipments and conditions. Then on the base of some essential mathematical methods in analyzing the Ion Exchange technology and the waveguides properties in detail, the theoretical model of Ion Exchange founded and then presented with the simulating methods of waveguides properties from the concentration of doped ion.The experiments focus on in the exchanges with the ion couple of K+/Na+. In optical substrates of the BK7 glasses, the basic configurations of optical waveguides are founded by the K+/Na+ first Ion Exchange processes. Then the configurations are optimized by the postprocessing, including the field-assisted thermal-anneal processes and the Na+-K+ second Ion Exchange processes, in order to realize the better properties of optical waveguides.In this paper, experiment processes are also discussed in detail. Then for the samples of planar and channel waveguides, the optical properties and the doped ion concentration is measured. The model of Ion Exchange is analyzed by comparing the theory results and the testing data, and the conclusion is drawn.Based on the joint efforts of experimental and theoretical practices, we hope that in this paper we could give a detailed comparison and analysis of the properties and effects of the first Ion exchange, second Ion exchange and the fieldrassistant annealing process. Further, we hope we could build a set of methods to analyze the relations between the optical properties of the waveguide and the Ion-exchangereaction process that are used to fabricate them. Finally, we present a set of fabrication parameters that are proved effective under examines of the principals we got from our attempts.
Keywords/Search Tags:Fabricating
PDF Full Text Request
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