Research On Integrated Sensor Chip Of Temperature, Humidity And Pressure For Atmosphere Detection

The integrated sensor for atmosphere detection consists of temperature, humidity and pressure sensors on one chip, which are used in air balloon data collection before spaceflight launch. The traditional sensors for atmosphere research have many disadvantages, such as large volume, separated sensors and high cost. So they were not adapted to the requirement of minitype spaceflight instrument. It is important to make research on micro sensors integrating temperature, humidity and pressure transducers.Based on Si3N4 material, this paper described a design of integrated sensor chip for atmosphere research, which had integrated humidity, pressure and temperature sensor. Considering MEMS processing compatibility, thermal conductivity principle was adopted to measure humidity, and Pt resistance used to measure temperature, and capacitive sensor to measure pressure. The measure method was introduced and the characteristics of the sensor have been calculated and simulated. To find a simpler processing, the integrated sensors based polyimide was designed and fabricated, and the processing was summarized.Data based on the test of the chip rudiment were analyzed so that we can optimize the design to improve the performance of the sensors including precision, stability and linearity. The advantages and disadvantages of different designs were compared and discussed for choosing a simple, efficient and cheap technology in the next works.