Research And Development Of Wafer Robot

Wafer robot is the important equipment of semiconductor manufacturing. Its speed, positioning accuracy and reliability directly affect the efficiency and the quality of production. The study on wafer robot is paid more attention overseas, and the technological system has been formed. Compared this, there is no merchandization of wafer robot in china. To develop wafer robot that has own intelligent property is very important.Firstly, based on the comparatively analysis of two main type wafer robot, and according to the requirement of transmission and positioning, the R-8 robot is adopted. According to the requirement of wafer robot control system, a 3 DOF opening NC control system based on PMAC+PC and servo drive system is confirmed, At last, the performance target of wafer robot is presented.According to the above performance requirement, the robot body is designed. The linear motion of end effector is realized by distributing transmission ratio and adopting timing belt mechanism. Then dynamic Analysis of the radial extension component is done with Lagrange method. This provide theoretic basis for the selection of servomotor and for holding the good dynamic and static performance of wafer robot. The rolling ball screw & the ball spline pair are used as actuating mechanism in the up-down rotary component, the new design improve the rigidity of structure of the system and simplify the mechanism.Control system is the wafer robot's nerve centre. According to the characteristic of its work and motion, the control system based on PMAC2-PC104 is designed, and the position control mode of the servo system is adopted. The flags of PMAC is used as the general I/O interface and the pneumatic control loop of the wafer robot is designed.Combining the robot body, The control system is adjusted. According to the experience and the method of the PID parameter adjustment, the PID parameter of the control system is adjusted. In the meantime, the wafer robot was controlled to test running by motion program based on PMAC. The result show that the end effector can move along line.