The Research Of The Theory Of Mercury Capacitance Acceleration Transducer

Micro Electronic Mechanical System (MEMS) is booming in recent years and is commonly known to have a promising prospect. It is the system that is manufactured by adopting the technique which is compatible with integrated circuit technique and the range of its size is from nanons to microns. Mems is widely used in many kinds of fields, among which transducer is significant.At present, the contradiction between requirement of high sensitivity and competence for overload exists in the course of the design of solid transducer while there comes demand for the kind of transducer that satisfies both high sensitivity and overload. Under such situation as mentioned above this paper developed a new type of transducer, that is, mercury capacitance acceleration transducer.This paper explained the elements of mercury capacitance acceleration transducer, and introduced the properties, application and manufacture methods of several typical dielectric films, including compalox film, silicon dioxide film, silicon nitride film, etc. In addition, relevant knowledge is also showed as the basis of our research, such as the basic theory of solid-liquid interface, the solid-liquid contact angle measurement and so on.In the basis of the feasibility analyses and potential advantages of mercury capacitance acceleration transducer, a control function of the surface of mercury under different accelerations is explored theoretically, which is meaning to the whole study of mercury capacitance acceleration transducer, and in chapter three, three different figure of mercury cavity is described, among which the I-shaped is emphasized. By experiment the contact angle of mercury and the typical dielectric is measured and computer software Matlab is utilized to dealing with and calculate the contact angle of solid-liquid. In the end the whole paper is summarized and the advice is given for further research.