Research And Fabrication For Beam Sampling Grating Used In ICF

The fabrication and characteristics of beam sampling grating (BSG) are investigated theoretically and experimentally in this paper. The main contents are as follows:Firstly, the significance of the research of the inertial confinement fusion (ICF) and the progress of the research on the beam sampling grating are presented. The diffraction theory of gratings is introduced in details. Scalar diffraction theory and vector diffraction theory are compared. Rigorous coupled-wave theory, which is one of vector diffraction theory, is selected as the foundation of numerical computation.Secondly, three optical systems on recording holographic BSG mask are designed. Their aberrations are analyzed by using ZEMAX.Thirdly, the diffraction efficiency of BSG is discussed by using rigorous coupled-wave theory. The results are useful for fabrication of BSG When the antireflective coating is applied to BSG, the diffraction efficiency of BSG is studied preliminarily.Finally, some small aperture BSGs are fabricated. The detecting system is established. According to this system, the measurement results of the BSG are given and analysis between experimental results and theory calculation are shown. By analysis, some useful informationfor practical etching of BSG is given.