Study On The Structure Design And Manufacture Technics Of Quartz Pressure Sensor

Quartz Pressure Sensor is a kind of Capacity Pressure Sensor. Due to quartz's distinct advantage, it is widely used in the fields of meteorological phenomena, military affairs, aviation, aerospace, cruise missile, climbing mountain and measuring height, petrochemical industry, pressure measurement.In this paper, the principal content includes two aspects. The first is the structure design of Quartz Capsule, firstly discusses the characteristics of different structure scheme; secondly calculates the size parameters using both ways of finite element and experience formula, analyses and contrasts the calculated results; In the end, fixes Quartz Capsules structure size by optimizing the size parameters. Besides, according to the finite element method we acquire the relationship Capsule is pressure, and the relationship Capsule is radius. Find the way to reduce linear error and increase capacitance's variety. The second is the research on Quartz Capsule manufacturing, also discusses the welding hot tension under different technological condition, analyses the calculated results', probes into the way to solve the problem of welding hot tension and analyses the welding technological condition, in addition, pay more attention to the problem of how to assure the size precision by corrodes technology.On the base of analysis and calculation, we made Quartz Capsule, and depend on test, we prove our analysis and calculation's correction.