A Novel Miniature Electric Field Sensor Based On MEMS Technique

Electric field has a close relationship with people's daily life and production processes. People have done a great deal of work on it, and have invented many kinds of electric field sensors (EPS). But, the miniature EPS for measuring static electric field accurately has not been reported up to this day. In this paper the author proposes a novel miniature EPS, which is tiny and can be produced in batch. It can be applied to measure the intensity of electric field in outer space, in atmosphere and on ground.The sensor bases on micro electromechanical systems (MEMS) technology and modern transducer technology.It is fabricated on silicon by means of semiconductor processing technology. Theoretical analysis, computer simulation and some processing experiments have proven the design feasible.