Research On Super High Frequency Plastic Package High Votage Silicon Pile

High voltage silicon pile is the key component of the output circuits of color TV and color monitor, whose switch frequency is the direct restrictive factor of line scan. With the development of the high quality displaying technology, the line scan frequency is changing higher and higher. The international (mainly Japan) silicon pile technology has been upgraded quickly and formed the situation of monopoly. Lacking the capability of manufacturing high frequency high voltage silicon pile whose reverse recovery time is below 55ns, the domestic enterprise is faced with great pressure. In 1999, a project was formed to study this problem in the Science and Tech Department under the corporation of Beijing University of Polytechnic and Nantong Gaoxin Corporation who was the professional silicon pile manufacturing enterprise. The contents of this thesis are the most basics and kernel parts of the project. The main contents of the project are to decreasing the reverse recovery time of the device under the condition of not changing the other parameters. The influence of different axis locations of the local low-lifetime region on the performance parameters of device was simulated using method of simulation in this paper. The influence of variation of the device structure parameters on the tradeoff of performance parameters of device and the influence of platinum diffusion condition on electrical parameters were studied according to our simulation results. Coinciding results have been achieved in our experiments based on the prior analyze. The results revealed that the tradeoff of reverse recovery time and the leak current can be improved efficiently by increasing the temperature and decreasing time of the platinum diffusion. According to this thought, excellent samples whose reverse recovery time below 28ns were manufactured. This performance has outrun the production of FUGI corporation and reached the worldwide advanced level and accomplished the project. It is hopeful to improve the disadvantageous situation of the enterprise if the sample was bulk manufactured. This will not only bring profit to the enterprise but boost the development of color TV and the monitor industry.