Study On Piezoelectric Precision Step Rotary Actuator

Micro-displacement electro-mechanical systems(MEMS) have a wide range of applications in microelectronics engineering, measurement science and technology, precision engineering, bio-engineering, nanotechnology and other fields of science and technology . precision step rotary actuator is one of the key components of MEMSIn this paper, a new type of precision step rotary actuator was designed, the core component of the actuator- shift mechanism of movement-adopts spiral deformation theory and symmetry structure,Converting micro-axial-displacement of piezoelectric ceramic into micro-angular-displacement of the output.To make precision step rotary actuator drive for rotating the output shaft ,shift mechanism of movement coordinated with the clamp movement. This article also analyzes the piezoelectric ceramic drive materials and its work pattern and make a model of the rotary drive. we apply the finite element analysis to a simplified model of the shift mechanism of movement,calculate the formula and verify that its core component--shift mechanism of movement--has a linear relationship between output angular displacement and axial displacement. Imposed load and axial displacement also have a linear relationship. In addition, the work state of the rotary actuator's main structure is also been analyzed by the method of the finite element analysis.and it's the rotary drive's work pattern.