Study On The Fabrication Of Piezoelectric Micro Cantilever Probe

With the development of micro-nano technology, human beings need much more powerful tools to implement the fabrication and characterization of micro-nano devices. Piezoelectric micro cantilever probe, which has excellent self-excitation and self-detection performance, had compassed the shortage of common probes. And it had been used as scanning probe microscope, tunnel sensors, micro-nano fabrication and high density data storage more and more. The fabrication of piezoelectric micro cantilever probe is regarded as the research object in this thesis. And the method of local piezoelectric layer was designed to resolve the compatible problem among the fabrication of probe, the piezoelectric film and the cantilever.Corrosion characteristic of (100) silicon and (110) silicon had been compared and analyzed. Theory model of tip die etched by (110) silicon had been established. And the mask dimension and the calculation formula of tip height were deduced too. The methods of inverted mold and wet etching were designed for fabricating the piezoelectric probe. The wet etching method by (100) silicon was used according to the condition of laboratory eventually. The compatible problem among those processes, such as the tip process fabricated by wet etching, piezoelectric thin film process fabricated by sol-gel method, and the micro-cantilever releasing process fabricated by dry etching, was resolved by the method of local piezoelectric layer. The piezoelectric probe arrays were fabricated eventually.The elastic constant of piezoelectric probe was tested by the platform of micor-force sensor. When the lengths of local piezoelectric layer were 225μm and 337.5μm, the elastic constants were 21.47N/m and 41.28N/m respectively, which were coming up to the theoretical values. And the probe could achieve good image resolution when it was used to scanning a raster sample.This thesis implemented the compatibility of the silicon tip process, piezoelectric thin film process and micro-cantilever process, and achieved the desired goals. All of these laid a good foundation for piezoelectric probe applying in the fabrication and characterization of micro-nano devices.