Research On Vacuum Gripper For Submillimeter Componets Operation

Vacuum adsorption tool (vacuum gripper) is simple, adaptable, flexible, economical and modular, and it is an typical micro-manipulation tool. It plays an important role in MEMS assembly and biomanipulation. The present vacuum gripper endeffector glass pipette is thermally tightened. It is difficult to make the glass pipette integrate with operation micro-force. So that the present vacuum gripper can not meet increasingly complex micro manipulation work. With micro-machining technology continuing to mature, against the characteristic of manipulation sub-millimeter scale micro device, this thesis design a miniature vacuum adsorption tool with high precision operation micro force detection and control, which is of great significance for micro manipulation such as MEMS assembly.In this paper, we aim at submillimetre components manipulation task. On the basis of deeply analyses micro component operation mechanism, develop a vacuum gripper with piezoresistive micro force sensor based on micro-machining for MEMS assembly.Firstly, scale effect in submillimetre components manipulation. Sum up manipulation method considering adhesion problem. Aim at micro MEMS parts manipulation demand, establish statics model for micromanipulation. Which provide theoretical basis for design vacuum gripper.Design the piezoresistive cantilever beam micro force sensor based on Micro-machining technology. The operating principle of micro force sensor is presented. Then modeling, analyzing the structure, achieving the best parameters. Arrange the sensor chip fabrication process flow. Then finish fabricating the sensor in China electronics technology group coperation the 13th research institute. Against micro sensor output signal characteristics, designs signal processing circuit base on Max1452.Design vacuum system which can provide precise negative and positive pressure. Present the consist of the vacuum system and operating principle. Through end pressure testing, the pressure parameter of the vacuum system is given. And that meet the demand of picking up and releasing micro components. At last, The static and dynamic characteristics of the sensor are measured and analyzed, and the computational results are given. Finally, we use the vacuum gripper system to perform picking up and releasing micro wafer experiment. That indicate the vacuum gripper system can finish the picking up and releasing job accurately and reliably.The study on vacuum gripper is one of the key technology of micro-assembly robot system. The research results in this paper are efficient to promote the development of micro-assembly technology.