Research On Characteristic Of Decoupled Microgyros

After micromechanical accelerometer, micromechanical gyroscope is an another important improvement in MEMS. The technology of gyroscope is wildly used in military affairs, navigation and is playing an important part in other fields of economy. So developing a micromechanical gyroscope with high performance and low cost is important in military affairs and economy of the country.In this paper, the performances of micromechanical gyroscopes are researched. First, the performance of frequency response is researched. The simulation and test result of the structure, which agree well, show that the natural frequency is between 2.3kHz and 2.5kHz and the driving mode matches well the sensing mode. The quality factor which is calculated by the frequency response curve is 199 at atmospheric pressure. Second, decoupling is researched by theory simulation and test. The test result shows that the decoupled structure has good effect and the coupling between the driving mode and sensing mode is under 0.5%. At last, the nonlinearity of spring is researched. The nonlinear factor is got from the simulation results, which is used to calculate that the natural frequency increases with the augment of the driving force. The conclusion is also proved by the test result.The contents studied in this thesis have the theoretical and practice significance to the design and improvement of gyroscope with high performance.