Research On The Frequency Tuning Of The Disk Resonator Gyroscope

The disk resonator gyroscope is one of the most promising micro-gyroscopes.It consists of multiple concentric nested rings of increasing radius,the gap between the rings can arrange a large number of electrodes for drive,detection and frequency tuning.However,the mode mismatch phenomenon caused by manufacturing errors seriously affected the performance of the gyro.In this paper,the influence of mass perturbation and stiffness perturbation on the frequency splitting of the resonator is studied,and the theoretical models of mass trimming and stiffness trimming are established.And electrostatic tuning experiments guided by these theoretical models are also carried out.The main research works are as follows:1.The working principle of disk is analyzed,and the source of error and the principle of frequency split are analyzed.The frequency mismatch model of the resonator is also established.2.The perturbation model of the perfect ring with added mass and radial stiffness is deduced.And the tuning model that the imperfect ring is added mass and stiffness perturbation to reduce split is also deduced.Based on the model of the ring resonator,the mass,stiffness perturbation model and tuning model of the nested rings structure are deduced respectively.In addition,the theoretical model of electrostatic tuning is derived.3.For the disk resonator,based on the theoretical model has been established and ANSYS software,the cases that the mass and spring are added to the perfect resonator are simulated.And the cases that the imperfect resonator is added mass and stiffness perturbation to reduce split is also simulated.The simulation results verify the correctness of the theoretical model and successfully achieve the modes matching of the imperfect resonator.4.The key steps of frequency trimming,modal test,and the basic equipment of tuning experiment are introduced.The electrostatic correction algorithm used to guide the tuning experiment is deduced,the general method of frequency tuning is summarized,and the software of electrostatic tuning is written.At last,the experiment of electrostatic trimming is carried out,and the frequency splits of several resonators are successfully modified to less than 0.03 Hz.