Research On The Design And Fabrication Technology Of Micro-Thermoelectric Generator And Related Measuring Systems

The thermoelectric generator has special advantage on the use of the low quality heat. Moreover, as a clean power source, it catches the eyes of people. The electrochemical deposition method has excellent cost advantage. The writer carried out the research of the structure design and manufacture technology. On this basis, the writer designed and developed the testing system for thermo-electric materials of thin film and testing system for micro thermoelectric generators.The author researched the preparation technology of the micro thermoelectric generators and made up the manufacture procedures as described bellow: use the ceramic oxidized aluminum as the base the single layer thermo-electric generator, then the electroless deposit the base with Cu and electroplate it to increase its width, then use Su-8 photo resistor etch to prepare the total micro zone and use AZ photo resistor to prepare the micro-zones of p-type thermoelectric material, use the pulse-electroplating method to deposit the p-thermoelectric material (BixSb1-x)2Te3 alloy, then use the AZ photo resistor to prepare the micro-zones of n-type thermoelectric material, use voltage-control method to deposit the n-type thermoelectric materials Bi2Te3-ySey. The single layer thermoelectric generators manufactured according to the above procedures can provide 33mv output voltage at 10k temperature difference.The author designed his own testing system of the output power of micro-thermoelectric generators and software associated which are based on the dynamic temperature difference testing technology. This system can realize the online testing of the temperature differences and output power testing, and give out the data in way of temperature difference-output power curves, load-output curves and the temperature-max output power curves. The max error of the system testing the thermocouple is about 0.75%, and the changing precision is about 0.025℃, which is less than 0.4% in the testing range. The current resolution is 100nA; the power detecting limit is 0.1pW.The author designed his own Seebeck coefficient testing system for micro thermoelectric materials and software associated. This system can test on line the Seebeck voltage of the thermo electric materials, temperature difference and the Seebeck coefficient and can demonstrate the seebeck-temperature difference curves, the temperatures of the hot and cold sides and the temperature difference changing curves in graphical interfaces at real time. At the same time ,it can provide information about the coefficient associated and regression resolution. The max error of this system testing thermo couple is about 0.75%, the precision of the voltage data collection is about±1μV, the temperature transforming precision about 0.025℃, which is less than 0.4% in the testing range, The associating linear regression resolution is about 66.5μV. The testing error is less than 2.9%.