| Molecular Booster Pump (MBP) is a new generation of vacuum pumps which is invented by Dr. Chu. With special configuration, MBP can run steadily and obtain clean medium-to-high vacuum, so it will have wide application in future.The paper discusses the pumping principle of MBP deeply, and then discribes its construction and performance. The main performance figures of MBP were tested, and the experimental results showed that MBP has high pumping speed in medium-to-high vacuum, which is very clean. MBP is successfully used in vacuum coating field and widely accepted by the users. It makes great sense to discuss and research the application of MBP in large sputtering coaters and consecutively coating productive lines. The experiment will lay theoretical fundation for its further application in other vacuum fields.It is pioneering to disseminate and apply MBP in every vacuum application field and it's a great pleasure for me to contribute to it. |
