Mechanism Design And Analysis Calculation Of Micro-displacement Electro Mechanical System

This thesis researches on the double-axis flexure hinges which widely used in the space multi-DOF micro-displacement work stage, and presents the compliance equations for double-axis flexure hinges. Based on the compliance equations, this thesis researches on the flexure hinges micro-displacement stage, and creates the theoretical modal of the stage. Therefore, in this thesis, the analysis and design methodology for flexure hinges micro-displacement stage are presented and the following studies are completed:1. Based on the basic equation of mechanics and calculus, this paper presents the deduction process of design equation for calculating the rotation compliance of double-axis flexure hinge. And this paper also presents the rotation compliance equation of right circular double-axis flexure hinge (θ_m=π/2). The equation isexact and more concise in expression than J.M.Paros's. The analytical equation is built to quantitatively analyze the influence of parameters of flexure hinge of rotation compliance. Simultaneously, a number of right circular double-axis flexure hinges with different shapes are analyzed with finite element analysis method. And comparison is made between the present equation and those of widely used J.M.Paros' equations. The results of three methods to calculate the rotation compliance are in good agreement, which indicates that the analytical equations are correct and concise.2. Based on the energy method, this paper presents the compliance equations for double-axis flexure hinges and right circular double-axis flexure hinges. Some suggestions are made in regard to the design of flexure hinges.3. By applying the basics principles of the finite element methods, a finite element modal of flexure hinge which is looked as non-uniform beam. Based on the stiffness matrix, the finite element modal of a single direction translation micro-displacement is created. The characteristic in the displacement output of the stage is gained by the modal. Simultaneously, a finite element simulation modal of the stage is constructed by finite element analysis software. And comparison is made between the theoretical modal and the simulation modal. The results of two methods to calculate the output displacement are in good agreement, which indicates that the theoretical modal is correct.4. A novel two degree of freedom micro-displacement work stage derived by PZT was developed. And a vertical two-bar mechanism was designed to replace four-bar parallel mechanism to realize two degree of freedom motions.5. Castigliano's second theorem was used to derive a series of analytical equations for computing the output stiffness and resonant frequency for different directions of the stage. The analytical equations were built to quantitatively analyze the influence of parameters of flexure hinge and length of link bar of output stiffness. Simultaneously, three group different dimensions of the stages were analyzed with finite element analysis method. And comparison was made between the theoretical modal and finite element modal. The results of the two methods were in good agreement, which indicated that the analytical equations were correct.