Study On Multiple Degrees Of Free Micro-displacement Stage

This thesis is one of the important parts of subject Study On Multiple Degrees of Freedom (Multi-DOF) Piezoelectric Micro-displacement Electromechanical System. In the thesis, many data on micro-displacement stages have been collected; their study status at home and abroad has been introduced in brief. And some control elements and mechanism in micro-displacement system have been sufficiently stated and compared. In addition, evaluation criterion of micro-displacement system has been summarized. In chapter 2 and chapter 3, the blueprint of 3 degrees of free (X-Y-8) displacement stage is laid out, applied two kinds of flexural-hinge micro-displacement mechanism (i.e. single and double parallel four bars), the later moves only in single direction without other additional one. Based on the study the author improves the structural parameters of rotation stage by optimization model after deriving its function of displacement under force. This thesis, applying finite element software, also studies and analyzes main mechanical characteristics of straight displacement androtation stages.Following design, according to a safe and feasible procedure, sample of this micro-displacement stage is successfully produced in order to study performance of the mechanism after analyzing the error of process by finite element method.In chapter 5, the relationship of force and displacement in every DOF is tested by a set of experiment equipment, and the validity of the theory and design has been testified. Otherwise, the characteristic of the drivers off and on mechanism has been tested for a good basis of further study. The last chapter concludes the design and study, which have been done.