| Transparent conductive oxide (TCO) films with both transparent and conductive characteristics, have been widely used in graphic LCD, solar battery electrodes, and other energy-saving window. It developed rapidly in recent years. Along with the display technology developed toward flexible, thin-oriented, the research of flexible TCO films is undertaken accordingly. And one of the most important researches is to deposit ITO thin films with lower resistivity for analogous visible transmittance on organic substrates at room temperature.Properties of flexible ITO films and preparation techniques are studied, and flexible SiO2/ITO/Ag/ITO films with better optoelectronic properties had been successfully prepared at room temperature. The resistance achieved 8 × 10-5 Ω ? cm and the visible transmittance is greater than 75%. The major works and innovation in this paper are as follows:1. To solve the difficulty of depositing ITO films with low resistivity at room temperature, we use UV irradiation to increase the oxidated activity of O2, thereby enhancing the conductivity and transmittance in the visible region of the films. This is an effective way to deposit ITO films with better optoelectronic properties on PET substrates at room temperature. Until now, no investigation of this way has been reported, and it have great significance in both theoretic and application area.2. To avoid the cracking of substrate during deposition, we use SiO2 as a buffer layer on PET substrate, it decreases the higher substrate gas rate and enhances the film bonding. It's a novel structure which can effectively prevent the organic substrate gas and impurities through, and improve adhesion properties of flexible ITO films.3. To seek lower resistivity, we designed SiO2/ITO/Ag/ITO structures according to the thin film optical theory and the study of properties of metal nano-films. The structure can improve the conductivity of the films without heating. And the parameters for depositing a transparentconductive layer of silver had also been got through a series of theoreticalcalculations and experiments. 4. Based on the study above, flexible SiO2/ITO/Ag/ITO films with highperformance has been successfully prepared with magnetron sputtering.The resistance achieved 8 × 10-5 Ω ? cm and the transmittance in visibleregion is greater than 75%.The investigation of depositing flexible ITO films at low temperature in this paper has great significance in both theoretic and application area.
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