Response Analysis For Microvibration Of High Technology Building

As science technology developed quickly, the high precision and high reliability of production test require higher anti-microvibration of high technology building structure. Amplitude range of vibration descended from 10 microns to submicron, and range of velocity descended from mm/s to micron per second, at the same time, the measure method was changed to frequency region from time-history. Therefore, it required to make carefully study on the environmental vibration and the microvibration responses of the structure, so as to make sure the structure achieved the production techniques requirement successfully.The anti-microvibration of structure is very complex problem. Firstly, the environmental vibration is random. Secondly, the structure produced very complex responses with the affection of the environmental vibration. The control system of anti-microvibration structure should take care of the capability anti-microvibration of structure and the project of the anti-microvibration. At present, the microvibration research mostly focused on anti-vibration of the equipment, a lot of articles brought lots kinds of damping measure (active, passive), arithmetic, dynamic analysis and so on, but it was very few researches on response analysis for microvibration of structure. In fact, the equipment platform is very large-scale not partial, and it connected with the foundation. Thus, it need take whole structure design for the...