The Key Technology Research Of Micro Dielectric Droplet Impingement Cooling System

The thermal manage problem of microelectronic system is more and more serious as the integrated level of electronic device increases continuously and it is one of puzzles in dire need of solution.Built on the analysis of traditional chip cooling methods, micro dielectric droplet impingement cooling system based on MEMS is put forward. This paper researches on the key technology of this cooling method.The main research content as follow:1. The research of boiling heat transfer theory: Analyse the process of bubble formation on smart flat with the concept of contact angle; Introduce the process of bubble growth , spring , movement with bubble dynamics theory and its characters;.2.The design of electrostatic micropump and modeling analysis: Confirm the design scheme of electrostatic double-chamber valveless micropump; Analyse membrane performance with thin plate libration theory, establish the nonlinear relation between center flexibility and electrostatic force and the calculation formula of first-order inherent frequency; Establish the relation between membrane deformation and the thickness of membrane , gap distance, drive voltage, and proceed the modal analysis of membrance; Deduce the flux calculation formula and work efficiency calculation formula, and give out the span of resistance coefficient ratio; Resarch on the flow rate distribution situation of enlarge/shrink pipe.3.The design of piezoelectric micronozzle and modal analysis: Confirm the design scheme of piezoelectric microspray array; Analyse the compound piezoelectric performace of thin-plate with thin plate libration theory, establish flexibility differential equation and the calculation formula of equivalent cross load: Establish the relation between compound piezoelectric thin-plate deformation and the thickness of thin-plate, the thickness of piezoelectric ceram, the drive voltage, and proceed modal analysis and harmonic response of piezoelectric thin-plate;Resarch on the flow rate distribution situation of micronozzle orifice.4. The experiment plat design of micro droplet impingement cooling system: Confirm the design scheme of the experiment plat frame and the control system; Draft preliminary scheme of experiment research; With random theory applied establish the cooling model of impingement cooling: fully nucleate boiling model and stable film boiling model.