LMI-based Robust H_∞ Control Theory For Nano Feeding Under Large Feeding Force

In this dissertation, after the analysis of the nanometer drive parts which belong to the ultra-procision manufacturing and on the basis of the reseach on the robust control theory, a set of LMI-based robust H_∞ control sheme for the nanometer driveparts has been put forward. The contents of the dissertation are presented as below.Chapter 1, precision processing and its importance of micro feeding are represented and the development of the LMI-based robust control theory is introduced. The research content of this dissertation is presented and each chapter of this dissertation is arranged.Chapter 2, the micro feeding is introduced in detain and the major functions of control system are analyzed and designed in this chapter. Firstly, the control system is designed. Secondly, the data communication scheme and communication protocol between WS16DP-6 computer and upper machine are introduced. At last, the software for upper machine and lower machine is introduced.Chapter 3, on the basis of the experiment on the nano feeding control platform, the mathematic modal of drive parts is established considering that the nano feeding under large feeding force has some open air temperature random disturbance phenomenon which influences the feed precision.Chapter 4, the basic theory of the LMI method and the the LMI-based robust H_∞control scheme is introduced here including output robust H_∞ control and state robust H_∞ control.Chapter 5, according to mathematic modal of drive parts established in the chapter 3 and the the basic theory of the the LMI-based robust Hm control schemeintroduced in the chapter 4, the output robust HK controller, the state robust Hx controller and the combination method of PID and Hx controller are designed. Then,the controllers are analyzed in graph in order to check the control effect.Last chapter, the full paper is generalized roundly and the next research work is prospected.