Lateral Superresolution Confocal Microscopy Method Based On Image Restoration And Annular Pupil Filtering

With the fast development of information industry, microelectronics manufacture technology has entered into 3D machining field at nanometer levels, so a severe challenge is put forward to the measurement of ultra-precision 3D microstructures. In modern imaging and measurement field, neither the near field optical microscope nor the conventional far field optical microscope is able to meet the technical need of large scale and high spatial resolution. Confocal microscope (CM), with a higher resolution capability and 3D optical sectioning property, can implement sample detection with large scale and no damnification. Though, the lateral resolution of CM has been enhanced to be 1.4 times of that of a conventional optical microscope under the same aperture focus ratio, it is still two orders of magnitude lower than the axial resolution of itself. So, it is urgent to further improve the lateral resolution of CM.For this purpose, by combining techniques of optical superresolution and image superresolution, this thesis proposes a novel lateral superresolution confocal microscopy method based on image restoration and annular pupil filtering. The following two aspects are the main research work I have completed so far.First, designed and realized a shaped annular beam confocal microscopy system (SABCMS), in order to improve the lateral resolution of CM. Particular descriptions are as follows.1. Studied on a superresolution cofocal sensing method and technology using a shaped annular beam based on binary optics theory. Chose the parameters of micro objective, collector and pupil filter appropriately. Realized a SABCMS which has advantages of integrated software and hardware, compact structure, easy to adjust the light circuit, etc.2. Accomplished a contrast experiment on images of standard step, which is to test the lateral resolution of the SABCMS. Results indicated that the lateral resolution of this system is better than that of a conventional CM under the same wavelength and lens, and it can reach 0.2μm.Second, processed images obtained by the SABCMS using way of image...