On Light Intensity Control And Vibration-resistance Of Interferometer

The phase-shifting interference is a osculant and high precision technology base on the wavelength. Because of the different size of object being measured leading to different size of interference wave which brings on asymmetry of the interference wave ineluctably we adopt the zoom lens to improve the measurement precision. Considering the interferometer's sensitivity to the vibration the interferometer is often used in the lab which restricts it being used widely. In order to solve these questions we study the automatic adjustment of light intension and vibration-resistant of interferometer in this paper.According to whether the light intension is in the zone of CCD linear response we control the direct current dynamo to drive the light filter to reduce the measure err effectively. Referring to the existed methods and abundant experiments, a new engineering-oriented technique named single-point phase-detecting vibration-resistant method is presented. It uses piezoelectric transition (PZT) as its device for phase compensation to guarantee measure precision.In this paper we intelligentize the interferometer utilizing the optics and the electricity technology which make it more suitable to application and extend proved by abundant experiments.