Research On Tooth Profile Design Method Of Micro-gear

In this paper, a new method for generating new conjugating gear profiles is developed. This method is to use deviation functions to reshape the tooth profiles in the foundation of the original pitch pairs. It is applicable to any type of pitch pairs and relatively easy to realize the desired geometrical and mechanical properties in the design.Firstly, the performance of several kinds of gears that is commonly used in present is analyzed. The sliding coefficients of the involute gear and the cycloidal gear are compared. The bending stress and the contact stress of the circular arc gear and involute gear are also analyzed and compared.Secondly, according to design and manufacture characteristic of the micro-gear, the direct design method called"deviation function"is proposed. By this method, the gear drives have small sliding coefficients and contact stress. Therefore, the gear wear is effectively reduced. The sliding coefficients, the bending stress, and the contact stress of the gears designed by the new method is calculated, compared with the involute gear.Thirdly, using the finite element analysis software ANSYS, the bending stress of the micro-gear is analyzed, compared with the cantilever beam method.Finally, the micro-gear is modeled in parameterization software UG. The micro-gears and the involute gears are processed by the UV-LIGA technology in the MEMS.