Research On The Design Of The Single Chip Integration Accelerometer Gyroscope

After the analyzing the development of the micro inertial sensors at home and abroad,and considering the defects of the accelerometer and gyroscope integration in the microinertial measurement unit like big, low fabrication precise, high coupling error and so on, thesingle chip integration accelerometer gyroscope is designed in this paper, and a thoroughresearch and discuss of this frontier project is finished.A single chip micro accelerometer gyroscope is design in this paper. It can sense theacceleration and angle velocity in the same direction at the same time. This accelerometergyroscope adopted the static comb drive, fold beam suspension and separate differentialcapacitance measurement. It can well restrain the structure coupling and information couplingof the two input inertial parameters.The dynamics mode of the accelerometer gyroscope is established according to itsworking principle, and the dynamics response to the input acceleration and angle velocity isanalyzed. The result shows that the accelerometer gyroscope can sense the acceleration andangle velocity in the same direction.As a multi dimensional sensor, one of the main errors in the accelerometer gyroscope isthe coupling error. The paper discusses the inherent coupling error and fabrication error of themicro structure in detail, and then some methods to eliminate the coupling errors are putforward.The simulation and optimization of the key structure in the accelerometer gyroscope isfinished. By means of ANSYS, the size optimization of the fold beam is finished, this makesthe sensitivity and the intensity in a much better condition;according to the force-electriccoupling simulation, the static driving and the capacitance detection of the accelerometergyroscope are designed and analyzed, the relation between the input inertial parameters andthe output capacitance and the characteristics of the comb drive are also got.Considering the characteristics of the micro structure and the micro fabricationtechnology, the process of the micro fabrication of the accelerometer gyroscope is designed inthis paper, and the layout of the micro fabrication is also designed.At last, this paper researches on the signal detection system and detection system of theaccelerometer gyroscope.