Research On The Application Of Air Springs For The Vibration Isolation System Of An Optics Platform

In the developing process of precision instruments and measuring appliances, precision measurements, precise processing and so on, the vibration control technology for working platforms of precision machinery systems is a vital problem throughout which needs to be solved.The main goal of this article is about the vibration control for precise optic platform. Some new ideas, new theories, and new technologies of the correlation disciplines are absorbed positively. Combining the theoretical research with the computer simulations, the fundamental technique researches are performed systematically for the dynamic analysis and vibration controls of the platform.To satisfy the request for vibration isolations of the optic platform, the active and passive control techniques of the optics platform are discussions respectively. First, this article analyzes the performance of the air spring as the key component of vibration isolation, emphatically discusses the functional relation of the air spring rigidity and the working pressure, attaches the air chamber volume, analyzed the influence of the damping to the vibration isolation transmission rate. Next, this article has produced optics platform dynamic equation under the general vibration significance, and carries on a discussion for the vibration question of the structure with damping or not. Finally, the paper designs the active and the passive control systems for the optic platform, and carries on the computer simulation separately, the isolation effect of the vibration system is shown.