| Piezoelectric micromotor is based on the inverse piezoelectric effect of piezoelectric material, a kind of micromotor that convert the micro deform of material into macro movement of rotor and slider through resonance amplifier and fiction couple. It can be used to directly drive micro mechanical motor, simplify system chain and reduce size. The application promising of piezoelectric micromotor is quite attractive.In this thesis, the domestic and abroad development of piezoelectric micromotor was discussed, and the characteristic and application of piezoelectric thin film material were analyzed, finally the finite element simulation of micromotor was presented. The cylindrical piezoelectric micromotor, the classical micromotor, was chosen to further discuss in detail.The design of cylindrical thin film piezoelectric micromotor is based on its dynamics characteristics. We started from the special structure of cylindrical piezoelectric micromotor, discussed the work principle of micromotor, and analyzed its running mechanism. Based on the Finite Element Method (FEM), the FE analysis software ANSYS was used to build the FE model. Through simulative analysis of finite element model and mechanical-electric coupled, the natural frequency of stator energy converter and stator's dimensions and their relation were discussed.The simulated results and the practical measurements are well agreed. Similarly, the other type of the thin film piezoelectric micromotor can be simulated by finite element analysis, so that it can provide pre-experienced guide and effective method for the study and design of production for the similar micromotor. |
