| Biochemical microsystem is one of the most important focuses of MEMS, and micro-sampling and measuring is the crucial process of analysis. Therefore, emphases have been paid on microneedle actuator.A new microneedle actuator driven by electromagnetic force is provided. This new actuator mainly focuses on sampling and measuring of biochemical samples.It consists of a microneedle, a microchannal, a reaction chamber, a couple of Au electrodes and a membrane actuator of a permanent magnet array. It can be driven bi-directionally by the electromagnetic field outside. The size of the actuator is 6mm X 8mm X 60um, and its aperture section is 20 m X 20um.The microneedle is fabricated by MEMS technology with SU-8, and the permanent magnet array is fabricated by electroplating technology. Processes of these two technologies are introduced in detail. Some problems occurred in fabrication process are e xperimentally t ested a nd s everal s olutions a re given. The actuator prototype is schematically showed and analyzed.The new actuator structure is mainly made of SU-8 and it can be bi-directionally driven by electromagnetic force from permanent magnet array. A new 3D fabrication method, which we describe briefly as "deposition step by step, exposure several times and development once", is firstly provided. The new project has the advantages of easy fabrication, low cost and the innovation in structure and techniques.
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