Nonlinearity Dynamics Of Micromachined Switches

Micro-Electro-Mechanical Systems(MEMS) is a promising technology based on intergrated Circuits. The size of the microstructures can be up to micron and even nanometer, and then they are integrated with the circuits to compose systems. There are many nonlinear factors existing in Micro-Electro-Mechanical systems (MEMS) caused by size and suface effects and some other factors, such as nonlinearity of geometrics, special material, electrostatic force and squeeze-film damping force, that often lead to the invalid design based on linear dynamics. The research indicates that nonlinearity has a very important effect on the dynamical behavior of MEMS system. In this paper, we firstly studied the 1:2 internal resonance by numerical simulation of a typical micromachined switch which was fixed at both ends by numerical simulation, considering the three factors, which are mechanism, electrostatic force and squeeze-film damping force, and on the condition that voltage changing, then studied the birfurcation with constraints of the simplified system.It is shown that, in the case of 1:2 internal resonance, there are complicated dynamical behaviors in the system while the voltage is small and the pull-in time will be greatly increased with the external excited resonance; in the case of external resonance without internal resonance, there are boundant with bifurcation behaviors in the system.