The Study Of Thin Film Amorphous Silicon Solar Cells

The energy crisis and pollution of environment is serious challenge for human being. It is the most critical and influential technology areas. Solar energy is a regenerative and clean energy. The research of solar cells becomes more and more important.The thin film a-Si:H solar cells compared with crystal silicon solar cells have advantages as following: 1) The fabrication technology of a-Si:H solar cells is simple. 2)The low deposition temperature, the low cost of material and the cheap substrate make the low cost of a-Si:H solar cells. 3)It is easy to apply integrated technology and then decrease the cost of solar cells again.In this paper we deposited solar cells with pin structure on glass substrate by use of separated PECVD system. The main work can be summed as following: l)The u c-Si:H p-type layer has been deposited and the comparison of I-V characteristics between the cells made with u c-Si:H as window layer and the cells made with a-SiC:H as window layer shows that the cells with u c-Si:H as window layer have better performance. 2)The i-type film layer has been deposited and we investigated the influence of i-type layer thickness to the solar cells parameter: Jsc,Voc,FF, n. 3) The uniformity and the stability of a-Si:H solar cells have been studied and we discussed the influence of i-type thickness and p-type u c-Si:H to the uniformity of a-Si:H solar cells. Then we also studied the influence of i-type thickness to the stability of a-Si:H solar cells. 4) The reverse solar cells with nip structure on glass substrate have been deposited.