The Preparation And Properties Of ZrN Films

Uranium is usually inclined to corrosion and more and more attention was focused on surface modification in order to improvement of surface corrosion resistance. Various of surface modification techniques are gradually developed and all kinds of corrosion resistant materials continuously occur. Unbalance magnetron sputtering technology was widely utilized and ZrN is an interesting corrosion resistant material.This thesis detailedly discussed die preparation of ZrN films with microware-ECR plasma enhanced magnetron sputtering deposition(MW-ECRPEMSD) technology.The composition and structure of the films synthesized by MW-ECRPEMSD technology were examined by electron probe, EDX, AFM, XRD, SEM, moreover the corrosion resistance of films were detected by anodic polarization. Furthermore, the wear resistance of films was tested by frictional wear. The relationship between properties of films and MW-ECRPEMSD technology was summarized.