The Study Of Thin Film Amorphous Silicon Solar Cells Material Deposited On Polymeric Substrate

In the recent years, amorphous silicon solar cells deposited on polymeric film substrate were getting more attention. Polymeric substrates, being light, large area series connected, flexible and non-breaking, offer additional unique advantages. Furthermore the cells on polyimide can be fabricated by roll-to-roll processing and the high price of solar cells can be decreased. So the solar cells deposited on polymeric film substrate have a promising prospects.In this paper, we investigated the properties of thin film material deposited on polyimide. The thin film material was prepared in a multi-chamber PECVD deposition system. This system had been modified according to plastic substrate requirements.The specific work can be summed up as following: l)The selection and treatment of polymeric substrate.2) For obtaining the best performance of intrinsic a~Si :H deposited on polyimide, we investigated the influence of substrate temperature powers pressure and flow.3) The high quality of p-type window layer on polyimide was gained by boron doping a-Si,-xCx:H.4) When the deposition feed gas for n-type layer was 0.6% silane(Si:H4) in hydrogen(H2), we can deposit the ideal n-type c-Si :H on polyimide.