Research On Key Techniques Of Tunable Fabry - Perot Interference Spectroscopy

In recent years, with the rapid development of science and technology, the application of imaging spectrometer technology has become increasingly popular, which is applied to the military affair from aerospace exploration to anti-camouflage. Now it starts to be used in the civilian aspects. Considering this development tendency, the imaging spectrometer is designed to meet the requirements of high-resolution and miniaturization. Therefore, from the perspective of the tunable Fabry-Perot interferometer, the thesis researches three key technologies, namely the design of Fabry-Perot cavity push-broom structure, the effect of moving mirror deflection to spectral resolution and spectral recovery methods.As to the design of Fabry-Perot cavity push-broom structure, a kind of flexible hinge structure based on micro-displacement amplification technology has been designed to solve the inadequacy of the maximum displacement, and adopts the principle of triangular amplification. By establishing the mathematical model, system displacement amplification factor can be obtained, and the finite element simulation is adopted for verification. As to the effect of moving mirror deflection on spectral resolution, the interferometric model is established to analyze the spectral resolution. According to interferometric imaging spectral theory, theoretical spectral resolution can be obtained. The mathematical model is established to discuss the tilt amount of different situations, and the effect of tilt amount for spectral resolution is calculated. With the detection method based on phase shifting interferometry technique, the interferometric fringe patterns under different optical path difference are collected, and the phase information is extracted to obtain the tilt amount of the Fabry-Perot cavity moving mirror. For spectral recovery of the tunable Fabry-Perot interferometer, the Fabry-Perot cavity model based on low reflective lens is established, and the spectral recovery method based on Fourier transform is deduced. Finally, the non-contact capacitive sensors for high-precision are used to detect the tunable Fabry-Perot cavity push-broom structure, and the push-broom structure meets the design requirements. The thesis completes the spectral recovery of the laser and fluorescent lamp interferometric fringe patterns.