Study On Computer Controlled Atmospheric Plasma Optical Processing

With the rapid development of space optics, Aspherical optical elements are more and more widely used in modern science and technology for its superior optical performance, compact construction, and other characteristics. So we must find a way to make fast, mass production of aspherical. At the same time, for the development of modern microelectronic technology and optical technology, the demand for surface quality has became more and more rigorous. In order to get extremely high reflectance value, surface roughness requirement for optical is lower than the nano-level. Conventional machining methods belong to the stress processing may damage the integrity of the work piece surface and residual stress, optical components in order to get extremely high reflectance value, requires surface roughness is lower than the nano-level, which can not meet the needs of the ultra smooth surface. CNC technology could enable optical aspheric precision milling and quickly, however, the efficiency and accuracy still are the main problems.For these reasons, we propose a new non-spherical processing method-plasma shaping technology with computer controlled optical surfacing, replacing the existing methods for fast, efficient, and without sub-surface damage. With computer controlled optical surfacing and atmospheric plasma polishing, we carried out a study related to: using the classic Preston polishing principle, optimized the parameters and improved the accuracy and efficiency, and got a better removal function; derived presence during the polishing process to solve the mathematical function of time; Established the polishing path of the process, using software to control the polishing; Simulated and optimizated the process with MATLAB on computer controlled surface residuals error effectively, and improved accuracy of the process, and finally carried on the experimental verification, completed the aspheric surface process work.With computer controlled optical surfacing, this new methods provides a practical approach to efficient, high precision and without sub-surface damage of aspheric optics.