Double-layer Silicon Nitride Anti-reflective Films On Crystalline Silicon Solar Cells

ABSTRACT:Antireflection coating in solar cell applications are extremely broad。There are three main advantages:(1)as anti-reflection film; (2) passive solar surface, reducing the surface recombination velocity; (3) films rich in hydrogen can passivate defect states in the cell body.。But often these advantages are contradictory, can not achieve the best results, double-layer film just to taking these factors on both sidesIn order to integrate the three advantages of silicon nitride film to achieve the purpose of maximizing advantages, we propose a new method, that is, double-layer silicon nitride anti-reflection film, which coated a thin silicon nitride layer with high refractive index,increasing the passivation, and then a thick silicon nitride layer layer of low refractive index is deposited to enhance optical matching and reduce the reflection of light。First, the best structure of silicon nitride is simulated by PC1D in this article。Then, a technology of double-layer silicon nitride anti-reflection structure is achieved through many experiments in tube PECVD equipment Finally, the process of single-layer silicon nitride flim and double-layer silicon nitride flim were used for mass production solar cells。Through measure the electrical performance parameters of solar cells,we found the performance of bilayer solar cells is consistent with the simulation, compared with single layer reflectivity was significantly lower in the short wavelength。External quantum efficiency in the short wavelength is higher than the monolayer, in full compliance with the reflectivity curve。Through large quantities of test data derived from statistics, double-layer silicon nitride film solar cell efficiency higher than the single layer to 0.2 percentage points and Other electrical performance parameters are also better than single-layer silicon nitride film solar cells。...