Research On Dynamic Performance Of Floatation Cushion With High Stiffness

With the development of precision and ultra-precision technology, the stiffness, accuracy and stability of the floatation cushion have put forward higher requirements. Since the compressibility of the gas, the performance of flotation cushion are faced with great difficulty, Therefore, great challenges in the investigation of the stiffness and stability of the flotation cushion are encounterd in the field.The teamwork have previously focused on floatation cushion by the way of the complex method of the elastic deformation that brings about changes of throttling area and pressure groove depth of the floatation cushion. it was found that the stiffness and bearing capacity of the floatation cushion with the structure of variable-section pressure groove was particularly raised.Taking the project application as the final goal, this article develops the research work by choosing the changeable restrictor floatation cushion as research content. The dynamic performance of elastic pressure groove floatation cushion, are investigated by comparing the elastic pressure groove floatation cushion with the dynamic performance of the rigid pressure groove floatation cushion and the powerful data basis for floatation cushion dynamics is provided. Because of floatation cushion work usually in a low-speed fashion, floatation cushion dynamic stiffness and static stiffness are basically equal, so this article only need simply research on its dynamic damping changes. Firstly, This paper introduces the working principle of floatation cushion, and ANSYS simulation software is introduced to analyze floatation cushion elastic deformation and do some further research for the floatation cushion gas cavity slot width change, which provides reference material for floatation cushion structural design. Secondly, the simplified dynamic Reynolds equation, and the FLUENT software are used to solve steady-state equation,and the pressure distribution data. The previous data obtained using MATLAB are used to compare to ensure the authenticity and accuracy of data, followed by the transient equation of preliminary exploration and research. At last, an ingenious equipment for the measurement of pressure distribution of floatation cushion clearance is devised, through which the capacity and stiffness of the new structure floatation cushion were tested in corresponding experiment environment and then, the principle, methods of application and data analysis of the equipment were also investigated. The elastic pressure groove floatation cushion was compared with rigid pressure groove floatation cushion results. It was experimentally proved that flotation cushion elastic dynamic pressure groove is above the rigid damping flotation pad pressure groove, and the conclusion that flexible flotation cushion pressure groove is with greater stability.