The Research Of Vacuum Coater Design Based On Virtual Prototyping Technology

Magnetron Sputtering Coating Machine is widely used in industrial plating for its high-speed, low temperature and other characteristics. With the development of science and technology, the industrial application requests a significant exaltation in parameters, such as film uniformity and thin film adhesion etc..However, because the domestic Magnetron Sputtering Coating Machine design usually adopts tradition design mode, designers mainly based on their old experiences in the design, with a wealth of experience formulas and specific design parameters for the design. It is difficult to achieve the optimization design of the Magnetron Sputtering Coating Machine by the traditional designing method, to adapt to the requirements of quality films. This paper applies the Virtual Prototyping Technology to the designing of the Magnetron Sputtering Coater Machine for solving the problems in the traditional designing, which is longer designing time, higher designing cost and lower film quality.Virtual Prototyping Technology is a new designing method, it is a digital designing method based on the simulated models of the products. According to Virtual Prototyping Technology, in the earlier time of the designing, the designers, users and manufactures can do modifications, characteristics testing, emulations of manufactures and uses on the simulated models of the product in the virtual environment. This is very important to the enlightenment of innovation designing, improvement of the designing quality, reducing of the designing errors and shortening of the designing time.Papers on the magnetron sputtering coating machine virtual prototype design framework and its key technology in system. The main work and research results are as follows:(1) On the basis of in-depth understanding of virtual prototyping technology and Magnetron Sputtering Coating Technology, built on model of coating machine through the cycle of the mechanical design, processing, assembling, testing, operation and maintenance life-cycle. Constructe framework for the realizing of a magnetron sputtering coating machine virtual prototype design and simulation products distributed collaboration, which provides a theoretical basis for the implementation of magnetron sputtering coating machine virtual prototype design.(2) Based on the established magnetron sputtering coating machine virtual prototype design framework, build on the typical magnetron sputtering coating machine virtual prototype design of the entity modeling and simulation functions. With a clear example of the design, the paper proves the feasibility of magnetron sputtering coating machine virtual prototype design in actual works. The Web Service Distributed Collaborative Simulation of the implementation process,make the design staff distributing in different locations through a set of corresponding technical support and distributed operating environment, access to transparent accessing and simulation of the relevant information, reuse of existing simulation model and participate the distributed collaborative modeling purposes expediently, which inspire the magnetron sputtering coating machine design inspiration and a strong guiding role.