Study On Nano-processing Equipment And Nano-assembly Processes Of Micro-nano Device Oriented

With the syncretizing of various new interdiscipline such as nanotechnology, biotechnology and information science, the new advanced material is developing rapidly at nanotechnology on traditional physics, chemistry, materials science basis as entered the twenty-first century. One of important direction is nanocomposite thin films system. New type of thin film materials which is the most popular subjects of international research of technology science played an important role in the contemporary high-tech. The basic research of new type of thin film materials decides the direction of information technology, microelectronics technology, computer science and bionics. The development of new type of thin film materials is determined by controlling advanced thin film materials, advanced producing thin film, structure of thin film and researching physical chemical action of thin film. At present, we are studying thin film materials from monolayer to multilayer, from thin film to super thin film, molecule, atom and nanometer field. The applied range of new type of thin film materials is extending, for example, super-hard thin films, optoelectronic thin films, laser thin films, magnetic thin films and bionic thin films. Nanocomposite thin films have evolved a significant direction in material science, biomedicine and information science. Nanocomposite thin films with the advantages of traditional composite material and modern nanomaterials is becoming a significant branch of nanomaterials and is studied deeply and payed attention to increasingly by researchers. Researcher are interesting in widely discussion of Nanocomposite-tech and composite material and have obtained a lot of significant achievements in scientific research.However, the industrialized development of bionic composite thin films has lagged, because compared with the development of nanocomposite thin films ,the development of manufacturing equipment is too slow. It showed two reasons: (i) The competitive power of processing equipment is weak. At present, Germanic company, American company and Chinese company can produce processing equipment with bionic intelligent thin film, so weak competitive power result in slow progress; (ii)The development of processing way is slow. Weak competitiveness result in lack of innovation. Layer-by-Layer assembled processing equipment still remains in original electrostatic assembly or processing technology over physisorption. The researchers have not considered assembled technology of super thin film with processing mode of non-physical type. The dominant technique with producing nanocomposite thin films will lead development of new technology and new material, because Biotechnology, nanotechnology, analytical Science, information science and cognitive science is combined by the technique with producing nanocomposite thin films. So the advanced countries have make some plans in view of existing situation all over the world. The equipment Development with producing nanocomposite thin films is of great urgency.We have developed independently miniature automated producing equipment with dip process on the basis of producing equipment designed by Germanic company and American company. First of all, the miniaturized processing equipment can move rapidly optional position by way of tridimensional robot arm. The free rotation chuck substitutes mechanical chuck in order to ensure stability of assembled material and film formation. Then we have designed newfashioned interface control and operational software. They simplified procedure of operational process and enhanced intelligent control capacity of equipment and processing capacity. Moreover, we have used Visual Basic to develop driver for controlling stepper motor and solenoid valve and have realized automatic production process. This equipment solves problem bringed by manual operating, for example, increase efficiency of film formation; decrease influence of human factor; enhance quality of film formation; provide scheme of storage; enhance repeatability and facilitate batch production. We introduce some process engineering with producing nanocomposite thin film as follows: at first, the chip with negative charge is dipped into solution of polymer with positive charge. Then surface of chip adsorbs the electrolyte with positive charge under the action of electrostatic attraction. Its electrostatic charges change into positive charge. The chip with positive charge is take out from solution of polymer with positive charge. Clean and dip into solution of polymer with negative charge(nanocolloidal particles). Then surface of chip with positive charge adsorbs the electrolyte with negative charge under the action of electrostatic attraction. Its electrostatic charges change into negative charge at the same time. The chip with negative charge is take out from solution of polymer with negative charge. Clean and do it repeatedly. Finally, we can get nanocomposite thin film.The production technology may apply to molecular field. It can synthesize a great diversity of material and bring promoter action in the fields of self-assembled material and represent Manufacturing of new type. Thereby the concept over manufacturing technique of material is updated. Regarding self-assembly techniques and developing research about self-assembled material is very significant sense.