Dynamics Analysis Of The Reticle Stage For Lithography

The lithography is an equipment with the highest accuracy in the Integrated Circuit manufacture field, it leads the highest level of the relative subject. The reticle stage is a key subsystem of the lithography, its positioning precision determines the final line width and any disturbance will affect the quality of the lithography, so it's important to know about the dynamic characteristic of the reticle stage. With many assemblies and complicated connections, it's difficult to get the accuracy modal of the reticle stage.In this thesis, using a linear spring-damping force to replace the flexible connection between bodies and having a simplification of the reticle stage based on the dynamic simulation, then getting the multi rigid-body simulation model for the reticle stage in the SimMechanics toolbox. Using the vibration test and the dynamic simulation to have the dynamic parameters of the reticle stage and getting a more accuracy dynamics modal. The dynamic mathematic models of the multi rigid-body are set up with the Lagrange Method, based on the dynamic mathematic models, the vibration simulation module are empoldered in Matlab. Based on the simulation module, the inherent vibration characteristic of the reticle stage is analyzed detailedly and getting the natural frequencies, then optimizing the natural frequencies of the reticle stage to satisfy our demand. The vibration tests with the hammer impact on the reticle stage are carried out in the entire lithography system to check the dynamic simulation model, the deviation between the natural frequencies gained from the test data and from the simulation results is reasonable and the simulation model is accepted.The accuracy reticle stage simulation modal based on the vibration test and the dynamic simulation can show the nature dynamic characteristic of the reticle stage. Analyzing the inherent vibration characteristic of the reticle stage and getting the natural frequencies, These research results will provide theoretical guidelines for structural design and optimizing.