| Micro milling technology of three dimensional micro parts manufacturing with micro machines is a novel manufacturing technology. This paper presents the design of architecture, CNC interface and servo system of ultra precision micro machine to meet the demand for miniaturized products. The research will promote the development of micro machine, and also will be one of the favorable conditions for developing the national economic construction and national defense construction.The design of machine based on the paralleled double CPU digital control system consists of IPC and Windows operating system. PMAC is used as the motion controller and the ultra precision linkage three-axes CNC machine, which consists of PMAC motion controller, high-speed electrical spindle, air-bearing work-stage, linear motor, grating and strong electric control cabinet, uses inductance probe and video microscope to carry out three dimensional precise presetting cutter.The application software of CNC system has adopted the modularization design mind and realized the monitoring of the machine's state and motion control via calling PComm32 dynamic link library of PMAC. Video acquisition module, which shows the video images that collected by video acquisition card, is added for satisfying the machines'special requirements. Moreover, this module could also be employed for three dimensional presetting cutter and surface morphology observation combining CCD and inductance probe. So it will greatly reduce preparatory works before processing.Servo system is an undamped system that drives air-bearing work-stage with linear motor and adopts grating for real-time feedback. Thus, the design focuses mainly on how to reduce work-stage vibration and outside load distribution. Servo algorithm is designed according to system properties. And then the optimal PID parameters are gained by simulating on the close-loop system to improve the locating accuracy and the servo tracking accuracy of the machine.Finally, the locating accuracy of the machine is tested, and the software is compiled to process testing data. Moreover, the machining feature of machine is verified by milling micro parts. The result shows that the design of the ultra precision micro machine system is feasible and could meet the machining demands of micro machine. |
