| Along with the ever-increasing demand of the products with higher performance, better quality, and shorter manufacturing cycle, it is very important that the modern manufacturing equipment has a better servo performance for high-speed, high acceleration and high-precision. Especially in the modern high-speed high-precision CNC machine tools and IC manufacturing equipments, high-speed and high-acceleration movement is to ensure high productivity, and the high-precision movement to ensure the quality in manufacturing. High-speed and high-acceleration motion servo system is one of the core technologies in the modern manufacturing equipments, particularly CNC machine tools and IC manufacturing equipments. The content of this papers mainly include:(1) Linear motor direct-drive servo system structure is used in order to meet the high-speed and high-acceleration movement, and then the model of high-speed and high-acceleration motion servo system is set up along with its deduced mathematical model, which is the basis for important theoretical significance.(2) Various possible modern control strategies at this stage for the high-speed high-precision occasions in linear motor system have been analysized, and due to more and more apparent non-linearity, perturbation in the system parameter, and disturbance of load factores, etc, the optimized fuzzy control strategy based on the genetic algorithm is proposed to replace the traditional PID control.(3) The basic theory of the fuzzy control and genetic algorithm has been introduced. The fuzzy controller is designed. And the introduced problem from the quantified and scale factors in fuzzy control parameters has been viewd as the optimization for those parameters, and then this paper focused on the application of the self-optimized fuzzy control design based on genetic algorithm.(4) The simulation of control system has been set up by using MATLAB/Simulink software module and other control software packages. The results in Simulation show that the performance of the fuzzy control system is better than that of the traditional PID controller; and the fuzzy control system based on the optimization of genetic algorithm is feasible in high-speed and high-acceleration movement system. |