| Hot-embossing technique for fabrocation polymer microstructures, which was already used in the production of polymer microfluidic devices, polymer micro optical components, and etc, has good potential in application.Hot-embossing has the advantages of short processing time, single processing step and suitable for batch production. With the development of the hot-embossing technique for fabrocation polymer microstructures, there is the demand of fabrication equipments in good quality and conformity.This paper is based on hot-embossing technique for fabrication polymer microstructures to develop the temperature control system of the RYJ-II hot embossing equipment. Firstly the hot embossing equipment abroad was summarized and the correlative hot-embossing machines were compared. The following is the main content:The scheme of system was investigated. According to the diathermancy and the mechanical ability, the material of hot-embossing block was decided. The heaing pod as heat element and the circulating-oil cooling as cooling method were employed in temperature system by comparing several heat/cooling projects. The heat insulation material was seclected. The hardware of the temperature control system had been designed and developed. Pt100 as the temperature sensor, temperature signal conditioning module, A/D converter, D/A converter, bi-directional thyristor module were collocated. Test for temperature control system had been done. The experiments include the rising/falling speed, temperature control accuracy and temperature distributing uniformity.Analysis has beed done to enhance the temperature uniformity. The two reasons to result to the temperature ununiformity of the surface are the thermal exchange of the surface and the low thermal diffusion modulus. Several projects were given. The temprature control system has been applied to fabricating polymer microstructures. The effect indicated the system satisfies the requirements of temperature control in hot embossing. |